This is an LD test wafer prober that automatically measures electrical and optical characteristics in a WAFER state of a VCSEL laser diode in a normal temperature (20 ° C) to high temperature (95 ° C) environment. Mapping is performed before measurement, and IL and λ measurements are performed one by one according to the map. After measurements of the IL and λ are completed, FFP measurement and NFP measurement are performed in sequence. The auto prober can supports multi-beam VCSELs.
Multi-beam VCSEL wafer
Wafer Mapping Function
Wafer mapping is performed at high speed before measurement.
Temperature Control Method / Range
・ Controlled by Peltier
・ 20 ℃ ～ 95 ℃
・ IL / IV measurement (CW)
・ Ir / Vr measurement
・ Wavelength measurement: Standard compatible equipment
Shortwave: OCEAN OPTICS HR2000 +
・ FFP measurement Far Field Pattern: 12M pixel camera Image processing method
・ NFP measurement Far Field Pattern: 12M pixel camera Image processing method