​Tester

VCSEL Probing

Wafer Tester

VWP5040A

Overview

This is an LD test wafer prober that automatically measures electrical and optical characteristics in a WAFER state of a VCSEL laser diode in a normal temperature (20 ° C) to high temperature (95 ° C) environment. Mapping is performed before measurement, and IL and λ measurements are performed one by one according to the map. After measurements of the IL and λ are completed, FFP measurement and NFP measurement are performed in sequence. The auto prober can supports multi-beam VCSELs.

Test Object

Multi-beam VCSEL wafer

Wafer Mapping Function

Wafer mapping is performed at high speed before measurement.

Temperature Control Method / Range

・ Controlled by Peltier

・ 20 ℃ ~ 95 ℃

Setting Items

・ IL / IV measurement (CW)

・ Ir / Vr measurement

・ Wavelength measurement: Standard compatible equipment

Shortwave: OCEAN OPTICS HR2000 +

・ FFP measurement Far Field Pattern: 12M pixel camera Image processing method

・ NFP measurement Far Field Pattern: 12M pixel camera Image processing method

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